Micro/Nano Fabrication Center
The Micro/Nano Fabrication Center, or MNFC, offers industrial space and facilities, device processing, and characterization equipment to researchers from academia, federal agencies, and the private sector.
The MNFC consists of approximately 15,000 square feet of space, with clean room space, a high capacity ultra-pure water system, an automated wastewater neutralization system, chemical storage bunkers, a mechanical shop, gas storage space, and a semiconductor grade Liquid/Gas N2 distribution system.
Several advanced research projects are currently underway at the MNFC, each helping investigators from a variety of backgrounds achieve their research and development goals.
We provide our clients with an extensive processing background to help them with their research and development activity. We train users to safely operate our equipment. We conduct regular free workshops focused on certain capabilities of interest. We support and assist faculty with lab courses requiring the use of Center's facility and equipment.
Four-Point Probe 9
Alpha Step 200 12
Wire Bonder 43
PECVD Deposition 80
LPCVD 203
Evaporation 71
Filmetrics F20 8
KLA Tencor P-15 Profiler 52
Labor 40
Lithography Exposure 52
Nitrogen 150
Oxidation/Anneal Furnace 66
Single Access/Guest Pass 21
Plasma Clean 38
Plasma Etch 52
Probestation Microscope 11
Diamond Saw 71
Nano Fab Space 15
Spin Coater 34
Si Wafer 40
Wet Bench/Clean/Etch/Hood 49
• ebeam
• LPCVD
• Photolighography
• Wet/dry - plasma etch
• Metrology, profilometry
Contact
Greg Book book@arizona.edu